Troubleshooting Slow Heat-Up in a Mica Heater System
https://thermal-engineering-guide.quantlynix.com/posts/semiconductor-heater-applications-in-wafer-processing-and-testing
In heated plates, a mica heater must deliver heat in a controlled way. It uses a resistive heating circuit supported and insulated by mica. One useful trait is high-temperature capability. Still, mechanical stress can change the result